The SRX system is specially developed for rapid thermal processing RTP in the semiconductor industry.
It has a high speed measurement frequency of 40 PID calculations per second.
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Measuring frequency
The SRX system has a fast measuring frequency of 40 measurements and PID calculations per second.
Dual loop control
Dual loop control can be performed with a single compact module. A maximum of 31 modules can be connected for a control with 62 loops.
